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반도체 드라이펌프(iXH)
iXH Semiconductor Dry Pumps
Greener and more reliable
with a lower cost of ownership
The iXH dry pump range sets new standards for harsh process capability, reliability and lower cost of ownership.
Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment. Each range has been specifically designed to bring you advantages in environmental performance, reliability in harsh conditions and agility in light duty applications.
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• Wide temperature range allows you to optimise the pump for minimal by-product accumulation from condensation and plating
• iXH Mk2 dry pumps provide even longer service life on the harshest of processes and can provide significant improvements
in power efficiency
• Innovative pump seal technology can lengthen process life and reduce your leakage risk
• Available with Xcede technology for enhanced corrosion resistance.